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Developing Efficient Thin Film Temperature Sensors Utilizing Layered Carbon Nanotube Films

In this paper, we present the fabrication of an efficient thin film temperature sensor utilizing chemical vapor deposited carbon nanotube (CNT) film as the sensing element on Si substrates, with diamond-like carbon (DLC):Ni as a catalyst in assisting CNT growth. The fabricated sensor showed good ele...

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Detalles Bibliográficos
Autores principales:	Sarma, Shrutidhara, Lee, Jang Ho
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6210711/ https://www.ncbi.nlm.nih.gov/pubmed/30241384 http://dx.doi.org/10.3390/s18103182

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