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A LN/Si-Based SAW Pressure Sensor

Surface Acoustic Wave (SAW) sensors are small, passive and wireless devices. We present here the latest results obtained in a project aimed at developing a SAW-based implantable pressure sensor, equipped with a well-defined, 30 μm-thick, 4.7 mm-in-diameter, Lithium Niobate (LN) membrane. A novel fab...

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Detalles Bibliográficos
Autores principales:	Nicolay, Pascal, Chambon, Hugo, Bruckner, Gudrun, Gruber, Christian, Ballandras, Sylvain, Courjon, Emilie, Stadler, Matthias
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6211043/ https://www.ncbi.nlm.nih.gov/pubmed/30332799 http://dx.doi.org/10.3390/s18103482

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