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Self-structuring in Zr(1−x)Al(x)N films as a function of composition and growth temperature

Nanostructure formation via surface-diffusion-mediated segregation of ZrN and AlN in Zr(1−x)Al(x)N films during high mobility growth conditions is investigated for 0 ≤ × ≤ 1. The large immiscibility combined with interfacial surface and strain energy balance resulted in a hard nanolabyrinthine lamel...

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Detalles Bibliográficos
Autores principales:	Ghafoor, N., Petrov, I., Holec, D., Greczynski, G., Palisaitis, J., Persson, P. O. A., Hultman, L., Birch, J.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6218527/ https://www.ncbi.nlm.nih.gov/pubmed/30397271 http://dx.doi.org/10.1038/s41598-018-34279-w

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