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Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding
In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly esta...
Autores principales: | Thuau, Damien, Laval, Cédric, Dufour, Isabelle, Poulin, Philippe, Ayela, Cédric, Salmon, Jean-Baptiste |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6220165/ https://www.ncbi.nlm.nih.gov/pubmed/31057903 http://dx.doi.org/10.1038/s41378-018-0017-2 |
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