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Toward High Carrier Mobility and Low Contact Resistance: Laser Cleaning of PMMA Residues on Graphene Surfaces

ABSTRACT: Poly(methyl methacrylate) (PMMA) is widely used for graphene transfer and device fabrication. However, it inevitably leaves a thin layer of polymer residues after acetone rinsing and leads to dramatic degradation of device performance. How to eliminate contamination and restore clean surfa...

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Detalles Bibliográficos
Autores principales: Jia, Yuehui, Gong, Xin, Peng, Pei, Wang, Zidong, Tian, Zhongzheng, Ren, Liming, Fu, Yunyi, Zhang, Han
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Berlin Heidelberg 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6223693/
https://www.ncbi.nlm.nih.gov/pubmed/30460292
http://dx.doi.org/10.1007/s40820-016-0093-5