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Three-Dimensional Electrochemical Axial Lithography on Si Micro- and Nanowire Arrays

[Image: see text] A templated electrochemical technique for patterning macroscopic arrays of single-crystalline Si micro- and nanowires with feature dimensions down to 5 nm is reported. This technique, termed three-dimensional electrochemical axial lithography (3DEAL), allows the design and parallel...

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Detalles Bibliográficos
Autores principales:	Wendisch, Fedja J., Saller, Michael S., Eadie, Alex, Reyer, Andreas, Musso, Maurizio, Rey, Marcel, Vogel, Nicolas, Diwald, Oliver, Bourret, Gilles R.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2018
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6238956/ https://www.ncbi.nlm.nih.gov/pubmed/30359028 http://dx.doi.org/10.1021/acs.nanolett.8b03608

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