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0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes. This gyroscope consists of a sensor and readout electronics, and the characteristics of the sensor directly determine the performance. For the sensor, a high-quality factor and long decaying time constant a...

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Detalles Bibliográficos
Autores principales:	Li, Qingsong, Xiao, Dingbang, Zhou, Xin, Xu, Yi, Zhuo, Ming, Hou, Zhanqiang, He, Kaixuan, Zhang, Yongmeng, Wu, Xuezhong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6240575/ https://www.ncbi.nlm.nih.gov/pubmed/31057920 http://dx.doi.org/10.1038/s41378-018-0035-0

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