Charged particle single nanometre manufacturing

Following a brief historical summary of the way in which electron beam lithography developed out of the scanning electron microscope, three state-of-the-art charged-particle beam nanopatterning technologies are considered. All three have been the subject of a recently completed European Union Projec...

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Detalles Bibliográficos
Autores principales: Prewett, Philip D, Hagen, Cornelis W, Lenk, Claudia, Lenk, Steve, Kaestner, Marcus, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W, Shi, Xiaoqing, Boden, Stuart A, Robinson, Alex P G, Yang, Dongxu, Hari, Sangeetha, Scotuzzi, Marijke, Huq, Ejaz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6244241/
https://www.ncbi.nlm.nih.gov/pubmed/30498657
http://dx.doi.org/10.3762/bjnano.9.266

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