Enhanced Sensitivity of a Hydrogen Sulfide Sensor Based on Surface Acoustic Waves at Room Temperature

In this contribution, a new surface acoustic wave (SAW)-based sensor was proposed for sensing hydrogen sulfide (H(2)S) at room temperature (30 °C), which was composed of a phase discrimination circuit, a SAW-sensing device patterned with delay line, and a triethanolamine (TEA) coating along the SAW propagation path of the sensing device. The TEA was chosen as the sensitive interface for H(2)S sensing, owing to the high adsorption efficiency by van der Waals’ interactions and hydrogen bonds with H(2)S molecules at room temperature. The adsorption in TEA towards H(2)S modulates the SAW propagation, and the change in the corresponding phase was converted into voltage signal proportional to H(2)S concentration was collected as the sensor signal. A SAW delay line patterned on Y-cut quartz substrate with Al metallization was developed photographically, and lower insertion and excellent temperature stability were achieved thanks to the single-phase unidirectional transducers (SPUDTs) and lower cross-sensitivity of the piezoelectric substrate. The synthesized TEA by the reaction of ethylene oxide and ammonia was dropped into the SAW propagation path of the developed SAW device to build the H(2)S sensor. The developed SAW sensor was characterized by being collecting into the phase discrimination circuit. The gas experimental results appear that fast response (7 s at 4 ppm H(2)S), high sensitivity (0.152 mV/ppm) and lower detection limit (0.15 ppm) were achieved at room temperature. It means the proposed SAW sensor will be promising for H(2)S sensing.