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A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circula...

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Detalles Bibliográficos
Autores principales: Frankis, Henry C., Su, Daniel, Bonneville, Dawson B., Bradley, Jonathan D. B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6263654/
https://www.ncbi.nlm.nih.gov/pubmed/30469328
http://dx.doi.org/10.3390/s18114061

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