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Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their b...

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Detalles Bibliográficos
Autores principales:	Liu, Haotian, Zhang, Li, Li, King Ho Holden, Tan, Ooi Kiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6265970/ https://www.ncbi.nlm.nih.gov/pubmed/30715056 http://dx.doi.org/10.3390/mi9110557

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