Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements

We investigated the possibility of employing refractive index (RI) measurements for inline incoming slurry control at the point of use (POU), as an alternative to the widespread densitometry method. As such, it became necessary to determine if RI could detect smaller changes in slurry composition an...

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Detalles Bibliográficos
Autores principales: Vazquez Bengochea, Leticia, Sampurno, Yasa, Kavaljer, Marcus, Johnston, Rob, Philipossian, Ara
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266087/
https://www.ncbi.nlm.nih.gov/pubmed/30715041
http://dx.doi.org/10.3390/mi9110542

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266087/
https://www.ncbi.nlm.nih.gov/pubmed/30715041
http://dx.doi.org/10.3390/mi9110542

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