Cargando…

Characterization of CMP Slurries Using Densitometry and Refractive Index Measurements

We investigated the possibility of employing refractive index (RI) measurements for inline incoming slurry control at the point of use (POU), as an alternative to the widespread densitometry method. As such, it became necessary to determine if RI could detect smaller changes in slurry composition an...

Descripción completa

Detalles Bibliográficos
Autores principales:	Vazquez Bengochea, Leticia, Sampurno, Yasa, Kavaljer, Marcus, Johnston, Rob, Philipossian, Ara
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266087/ https://www.ncbi.nlm.nih.gov/pubmed/30715041 http://dx.doi.org/10.3390/mi9110542

Ejemplares similares

Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization
por: Bahr, Matthew, et al.
Publicado: (2017)

Chemical Mechanical Planarization and Old Italian Violins
por: Philipossian, Ara, et al.
Publicado: (2018)

Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO(2) Chemical Mechanical Planarization Performance
por: McAllister, Jeffrey, et al.
Publicado: (2019)

Effect of ethylenediamine on CMP performance of ruthenium in H(2)O(2)-based slurries
por: Xu, Yi, et al.
Publicado: (2021)

Silicon Wafer CMP Slurry Using a Hydrolysis Reaction Accelerator with an Amine Functional Group Remarkably Enhances Polishing Rate
por: Bae, Jae-Young, et al.
Publicado: (2022)

Determination of the repeatability of corneal densitometry as measured with a Scheimpflug camera device in refractive surgery candidates
por: Balparda, Kepa, et al.
Publicado: (2023)

Inhibition of CMP-sialic acid transport by endogenous 5-methyl CMP
por: Ahuja, Shivani, et al.
Publicado: (2021)

The NMR studies of CMP inhibition of polysialylation
por: Lu, Bo, et al.
Publicado: (2023)

Topometric Indices And Corneal Densitometry Change After Corneal Refractive Surgery Combined With Simultaneous Collagen Crosslinking
por: Piyacomn, Yonrawee, et al.
Publicado: (2019)

Changes in the Optical Corneal Densitometry, Visual Acuity, and Refractive Error after the Annular Intracorneal Inlay Implantation
por: Jabbarvand, Mahmoud, et al.
Publicado: (2021)

TreeCmp: Comparison of Trees in Polynomial Time
por: Bogdanowicz, Damian, et al.
Publicado: (2012)

Identification of cCMP binding and activated proteins
por: Wolfertstetter, Stefanie, et al.
Publicado: (2013)

Fishing for elusive cCMP-degrading phosphodiesterases
por: Schneider, Erich, et al.
Publicado: (2013)

Structural and functional characterization of CMP-N-acetylneuraminate synthetase from Vibrio cholerae
por: Bose, Sucharita, et al.
Publicado: (2019)

Bone Densitometry and Fat Index after Sleeve and Subsleeve Gastrectomy in Animal Model
por: Khazraei, Hajar, et al.
Publicado: (2022)

The Relationship between Bone Mineral Densitometry and Visceral Adiposity Index in Postmenopausal Women
por: Elmas, Halis, et al.
Publicado: (2023)

Quantitative Aspects of Bone Densitometry
por: International Commission on Radiation Units and Measurements. Bethesda
Publicado: (2009)

Corneal densitometry in high myopia
por: Dong, Jing, et al.
Publicado: (2018)

Technique for Dissection and Measurement of Refractive Index of Osteones
por: Ascenzi, Antonio, et al.
Publicado: (1959)

The measure of the index of refraction of a gas with the refractometer
por: Placidi, M
Publicado: (1976)

Refractive index measurements of solid deuterium–tritium
por: Iwano, Keisuke, et al.
Publicado: (2022)

Enantioselectivity of human AMP, dTMP and UMP-CMP kinases
por: Alexandre, Julie A.C., et al.
Publicado: (2007)

Cyclic CMP and cyclic UMP: new (old) second messengers
por: Seifert, Roland, et al.
Publicado: (2011)

Approaches to Sustainability in Chemical Mechanical Polishing (CMP): A Review
por: Lee, Hyunseop, et al.
Publicado: (2021)

Characterizing the Human Cone Photoreceptor Mosaic via Dynamic Photopigment Densitometry
por: Sabesan, Ramkumar, et al.
Publicado: (2015)

THE VARIATION IN THE CORPUSCULAR HEMOGLOBIN CONCENTRATION IN THE HUMAN RED CELL, AS MEASURED BY DENSITOMETRY
por: Ponder, Eric, et al.
Publicado: (1955)

Densitometry and temperature measurement of combustion gas by X-ray Compton scattering
por: Sakurai, Hiroshi, et al.
Publicado: (2016)

ELECTRON DENSITOMETRY OF STAINED VIRUS PARTICLES
por: Hall, Cecil E.
Publicado: (1955)

Influence of eye tilt on corneal densitometry
por: Consejo, Alejandra, et al.
Publicado: (2022)

CMP Pad Conditioning Using the High-Pressure Micro-Jet Method
por: Li, Xin, et al.
Publicado: (2023)

Measuring refractive index distribution in the human eye lens
por: Pope, James M., et al.
Publicado: (2015)

Accuracy of the Double Variation Technique of Refractive Index Measurement
por: Verkouteren, Jennifer R., et al.
Publicado: (1992)

Interferometric measurements of refractive index and dispersion at high pressure
por: Kim, Yong-Jae, et al.
Publicado: (2021)

Intracellular Detection and Localization of Nanoparticles by Refractive Index Measurement
por: Géloën, Alain, et al.
Publicado: (2021)

Identification and characterization of important residues in the catalytic mechanism of CMP-Neu5Ac synthetase from Neisseria meningitidis
por: Horsfall, Louise E, et al.
Publicado: (2010)

Measurements of scleral thickness and corneal optic densitometry in patients with systemic lupus erythematosus
por: Kaya, Hüseyin, et al.
Publicado: (2020)

Characterization of Long-period Grating Refractive Index Sensors and Their Applications
por: Tsuda, Hiroshi, et al.
Publicado: (2009)

Characterization of Chromatic Dispersion and Refractive Index of Polymer Optical Fibers
por: Ayesta, Igor, et al.
Publicado: (2017)

Preparation and Characterization of a New Low Refractive Index Ferrofluid
por: Cao, Qianhui, et al.
Publicado: (2019)

Extracellular Vesicle Refractive Index Derivation Utilizing Orthogonal Characterization
por: Pleet, Michelle L., et al.
Publicado: (2023)

Cannot write session to /tmp/vufind_sessions/sess_i8ne3inkco92tv50fmglpjrvvv