A 5 g Inertial Micro-Switch with Enhanced Threshold Accuracy Using Squeeze-Film Damping

Our previous report based on a 10 g (gravity) silicon-based inertial micro-switch showed that the contact effect between the two electrodes can be improved by squeeze-film damping. As an extended study toward its potential applications, the switch with a large proof mass suspended by four flexible s...

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Detalles Bibliográficos
Autores principales: Peng, Yingchun, Wu, Guoguo, Pan, Chunpeng, Lv, Cheng, Luo, Tianhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266094/
https://www.ncbi.nlm.nih.gov/pubmed/30715038
http://dx.doi.org/10.3390/mi9110539

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266094/
https://www.ncbi.nlm.nih.gov/pubmed/30715038
http://dx.doi.org/10.3390/mi9110539

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