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A 5 g Inertial Micro-Switch with Enhanced Threshold Accuracy Using Squeeze-Film Damping
Our previous report based on a 10 g (gravity) silicon-based inertial micro-switch showed that the contact effect between the two electrodes can be improved by squeeze-film damping. As an extended study toward its potential applications, the switch with a large proof mass suspended by four flexible s...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266094/ https://www.ncbi.nlm.nih.gov/pubmed/30715038 http://dx.doi.org/10.3390/mi9110539 |