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Study of GaN-Based Thermal Decomposition in Hydrogen Atmospheres for Substrate-Reclamation Processing

This study investigates the thermal decomposition behavior of GaN-based epilayers on patterned sapphire substrates (GaN-epi/PSSs) in a quartz furnace tube under a hydrogen atmosphere. The GaN-epi/PSS was decomposed under different hydrogen flow rates at 1200 °C, confirming that the hydrogen flow rat...

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Detalles Bibliográficos
Autores principales:	Huang, Shih-Yung, Lin, Jian-Cheng, Ou, Sin-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6266161/ https://www.ncbi.nlm.nih.gov/pubmed/30355986 http://dx.doi.org/10.3390/ma11112082

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