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Self-Calibration and Performance Control of MEMS with Applications for IoT
A systemic problem for microelectromechanical systems (MEMS) has been the large gap between their predicted and actual performances. Due to process variations, no two MEMS have been able to perform identically. In-factory calibration is often required, which can represent as much as three-fourths of...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6308620/ https://www.ncbi.nlm.nih.gov/pubmed/30551627 http://dx.doi.org/10.3390/s18124411 |