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Highly Conductive and Transparent AZO Films Fabricated by PLD as Source/Drain Electrodes for TFTs
Aluminum-doped ZnO (AZO) has huge prospects in the field of conductive electrodes, due to its low price, high transparency, and pro-environment. However, enhancing the conductivity of AZO and realizing ohmic contact between the semiconductor and AZO source/drain (S/D) electrodes without thermal anne...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6317027/ https://www.ncbi.nlm.nih.gov/pubmed/30563271 http://dx.doi.org/10.3390/ma11122480 |