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Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were...

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Detalles Bibliográficos
Autores principales:	Wei, Debo, Fu, Jianyu, Liu, Ruiwen, Hou, Ying, Liu, Chao, Wang, Weibing, Chen, Dapeng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6338961/ https://www.ncbi.nlm.nih.gov/pubmed/30621043 http://dx.doi.org/10.3390/s19010188

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