Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders

Metal-assisted catalytic etching (MACE) using Ag nanoparticles as catalysts and H(2)O(2) as oxidant has been performed on single-crystal Si wafers, single-crystal electronics grade Si powders, and polycrystalline metallurgical grade Si powders. The temperature dependence of the etch kinetics has bee...

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Detalles Bibliográficos
Autores principales: Kolasinski, Kurt W., Unger, Bret A., Ernst, Alexis T., Aindow, Mark
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Frontiers Media S.A. 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6343677/
https://www.ncbi.nlm.nih.gov/pubmed/30701171
http://dx.doi.org/10.3389/fchem.2018.00651

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6343677/
https://www.ncbi.nlm.nih.gov/pubmed/30701171
http://dx.doi.org/10.3389/fchem.2018.00651

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