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Crystallographically Determined Etching and Its Relevance to the Metal-Assisted Catalytic Etching (MACE) of Silicon Powders
Metal-assisted catalytic etching (MACE) using Ag nanoparticles as catalysts and H(2)O(2) as oxidant has been performed on single-crystal Si wafers, single-crystal electronics grade Si powders, and polycrystalline metallurgical grade Si powders. The temperature dependence of the etch kinetics has bee...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Frontiers Media S.A.
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6343677/ https://www.ncbi.nlm.nih.gov/pubmed/30701171 http://dx.doi.org/10.3389/fchem.2018.00651 |