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Crystallisation Phenomena of In(2)O(3):H Films

The crystallisation of sputter-deposited, amorphous In(2)O(3):H films was investigated. The influence of deposition and crystallisation parameters onto crystallinity and electron hall mobility was explored. Significant precipitation of metallic indium was discovered in the crystallised films by elec...

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Detalles Bibliográficos
Autores principales:	Muydinov, Ruslan, Steigert, Alexander, Wollgarten, Markus, Michałowski, Paweł Piotr, Bloeck, Ulrike, Pflug, Andreas, Erfurt, Darja, Klenk, Reiner, Körner, Stefan, Lauermann, Iver, Szyszka, Bernd
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6356562/ https://www.ncbi.nlm.nih.gov/pubmed/30650608 http://dx.doi.org/10.3390/ma12020266

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