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Scanning MEMS Mirror for High Definition and High Frame Rate Lissajous Patterns

Scanning MEMS (micro-electro-mechanical system) mirrors are attractive given their potential use in a diverse array of laser scanning display and imaging applications. Here we report on an electrostatic MEMS mirror for high definition and high frame rate (HDHF) Lissajous scanning. The MEMS mirror co...

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Detalles Bibliográficos
Autores principales:	Seo, Yeong-Hyeon, Hwang, Kyungmin, Kim, Hyunwoo, Jeong, Ki-Hun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6356757/ https://www.ncbi.nlm.nih.gov/pubmed/30669314 http://dx.doi.org/10.3390/mi10010067

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