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Implementation of a CMOS/MEMS Accelerometer with ASIC Processes

This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated c...

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Detalles Bibliográficos
Autores principales:	Liu, Yu-Sian, Wen, Kuei-Ann
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6357200/ https://www.ncbi.nlm.nih.gov/pubmed/30642025 http://dx.doi.org/10.3390/mi10010050

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