Dual Resonator MEMS Magnetic Field Gradiometer

Accurate knowledge of the spatial magnetic field distribution is necessary when measuring field gradients. Therefore, a MEMS magnetic field gradiometer is reported, consisting of two identical, but independent laterally oscillating masses on a single chip. The sensor is actuated by Lorentz force and...

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Detalles Bibliográficos
Autores principales: Kahr, Matthias, Stifter, Michael, Steiner, Harald, Hortschitz, Wilfried, Kovács, Gabor, Kainz, Andreas, Schalko, Johannes, Keplinger, Franz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387345/
https://www.ncbi.nlm.nih.gov/pubmed/30691030
http://dx.doi.org/10.3390/s19030493

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6387345/
https://www.ncbi.nlm.nih.gov/pubmed/30691030
http://dx.doi.org/10.3390/s19030493

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