Cargando…
Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3)...
Autores principales: | , , , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391434/ https://www.ncbi.nlm.nih.gov/pubmed/30808883 http://dx.doi.org/10.1038/s41598-019-39115-3 |
_version_ | 1783398297409421312 |
---|---|
author | Chen, Christopher T. Pedrini, Jacopo Gaulding, E. Ashley Kastl, Christoph Calafiore, Giuseppe Dhuey, Scott Kuykendall, Tevye R. Cabrini, Stefano Toma, Francesca M. Aloni, Shaul Schwartzberg, Adam M. |
author_facet | Chen, Christopher T. Pedrini, Jacopo Gaulding, E. Ashley Kastl, Christoph Calafiore, Giuseppe Dhuey, Scott Kuykendall, Tevye R. Cabrini, Stefano Toma, Francesca M. Aloni, Shaul Schwartzberg, Adam M. |
author_sort | Chen, Christopher T. |
collection | PubMed |
description | Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3) synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS(2). Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO(3) thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. These results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials. |
format | Online Article Text |
id | pubmed-6391434 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-63914342019-03-01 Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides Chen, Christopher T. Pedrini, Jacopo Gaulding, E. Ashley Kastl, Christoph Calafiore, Giuseppe Dhuey, Scott Kuykendall, Tevye R. Cabrini, Stefano Toma, Francesca M. Aloni, Shaul Schwartzberg, Adam M. Sci Rep Article Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3) synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS(2). Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO(3) thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. These results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials. Nature Publishing Group UK 2019-02-26 /pmc/articles/PMC6391434/ /pubmed/30808883 http://dx.doi.org/10.1038/s41598-019-39115-3 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Chen, Christopher T. Pedrini, Jacopo Gaulding, E. Ashley Kastl, Christoph Calafiore, Giuseppe Dhuey, Scott Kuykendall, Tevye R. Cabrini, Stefano Toma, Francesca M. Aloni, Shaul Schwartzberg, Adam M. Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title_full | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title_fullStr | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title_full_unstemmed | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title_short | Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides |
title_sort | very high refractive index transition metal dichalcogenide photonic conformal coatings by conversion of ald metal oxides |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391434/ https://www.ncbi.nlm.nih.gov/pubmed/30808883 http://dx.doi.org/10.1038/s41598-019-39115-3 |
work_keys_str_mv | AT chenchristophert veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT pedrinijacopo veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT gauldingeashley veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT kastlchristoph veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT calafioregiuseppe veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT dhueyscott veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT kuykendalltevyer veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT cabrinistefano veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT tomafrancescam veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT alonishaul veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides AT schwartzbergadamm veryhighrefractiveindextransitionmetaldichalcogenidephotonicconformalcoatingsbyconversionofaldmetaloxides |