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Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3)...

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Autores principales: Chen, Christopher T., Pedrini, Jacopo, Gaulding, E. Ashley, Kastl, Christoph, Calafiore, Giuseppe, Dhuey, Scott, Kuykendall, Tevye R., Cabrini, Stefano, Toma, Francesca M., Aloni, Shaul, Schwartzberg, Adam M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391434/
https://www.ncbi.nlm.nih.gov/pubmed/30808883
http://dx.doi.org/10.1038/s41598-019-39115-3
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author Chen, Christopher T.
Pedrini, Jacopo
Gaulding, E. Ashley
Kastl, Christoph
Calafiore, Giuseppe
Dhuey, Scott
Kuykendall, Tevye R.
Cabrini, Stefano
Toma, Francesca M.
Aloni, Shaul
Schwartzberg, Adam M.
author_facet Chen, Christopher T.
Pedrini, Jacopo
Gaulding, E. Ashley
Kastl, Christoph
Calafiore, Giuseppe
Dhuey, Scott
Kuykendall, Tevye R.
Cabrini, Stefano
Toma, Francesca M.
Aloni, Shaul
Schwartzberg, Adam M.
author_sort Chen, Christopher T.
collection PubMed
description Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3) synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS(2). Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO(3) thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. These results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials.
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spelling pubmed-63914342019-03-01 Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides Chen, Christopher T. Pedrini, Jacopo Gaulding, E. Ashley Kastl, Christoph Calafiore, Giuseppe Dhuey, Scott Kuykendall, Tevye R. Cabrini, Stefano Toma, Francesca M. Aloni, Shaul Schwartzberg, Adam M. Sci Rep Article Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3) synthesized via atomic layer deposition (ALD). These conformal nanocrystalline thin films demonstrate a surprisingly high index of refraction (n > 3.9), and structural fidelity compatible with lithographically defined features down to ~10 nm. Although this process yields highly polycrystalline films, the optical constants are in agreement with those reported for single crystal bulk WS(2). Subsequently, we demonstrate three photonic structures - first, a two-dimensional hole array made possible by patterning and etching an ALD WO(3) thin film before conversion, second, an analogue of the 2D hole array first patterned into fused silica before conformal coating and conversion, and third, a three-dimensional inverse opal photonic crystal made by conformal coating of a self-assembled polystyrene bead template. These results can be trivially extended to other transition metal dichalcogenides, thus opening new opportunities for photonic devices based on high refractive index materials. Nature Publishing Group UK 2019-02-26 /pmc/articles/PMC6391434/ /pubmed/30808883 http://dx.doi.org/10.1038/s41598-019-39115-3 Text en © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.
spellingShingle Article
Chen, Christopher T.
Pedrini, Jacopo
Gaulding, E. Ashley
Kastl, Christoph
Calafiore, Giuseppe
Dhuey, Scott
Kuykendall, Tevye R.
Cabrini, Stefano
Toma, Francesca M.
Aloni, Shaul
Schwartzberg, Adam M.
Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title_full Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title_fullStr Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title_full_unstemmed Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title_short Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides
title_sort very high refractive index transition metal dichalcogenide photonic conformal coatings by conversion of ald metal oxides
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391434/
https://www.ncbi.nlm.nih.gov/pubmed/30808883
http://dx.doi.org/10.1038/s41598-019-39115-3
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