Very High Refractive Index Transition Metal Dichalcogenide Photonic Conformal Coatings by Conversion of ALD Metal Oxides

Materials for nanophotonic devices ideally combine ease of deposition, very high refractive index, and facile pattern formation through lithographic templating and/or etching. In this work, we present a scalable method for producing high refractive index WS(2) layers by chemical conversion of WO(3)...

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Detalles Bibliográficos
Autores principales: Chen, Christopher T., Pedrini, Jacopo, Gaulding, E. Ashley, Kastl, Christoph, Calafiore, Giuseppe, Dhuey, Scott, Kuykendall, Tevye R., Cabrini, Stefano, Toma, Francesca M., Aloni, Shaul, Schwartzberg, Adam M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6391434/
https://www.ncbi.nlm.nih.gov/pubmed/30808883
http://dx.doi.org/10.1038/s41598-019-39115-3

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