Fabrication of Highly Packed Plasmonic Nanolens Array Using Polymer Nanoimprinted Nanodots for an Enhanced Fluorescence Substrate

A simple and cost-effective fabrication method for plasmonic nanolens arrays (PNA) with a narrow gap has been proposed for fabricating enhanced fluorescence substrates, in which the fluorophores interacting with the enhanced electromagnetic field generated by localized surface plasmons provide a higher fluorescence signal. The PNA was fabricated by the sequential depositions of the SiO(2) and Ag layers on a UV-nanoimprinted nanodot array with a pitch of 500 nm, a diameter of 250 nm, and a height of 100 nm. During the deposition processes, the shape of the nanodots changed to that of nanolenses, and the gap between the nanolenses was decreased via sidewall deposition. To examine the feasibility of the fabricated PNA for enhanced fluorescence application, a streptavidin-Cy5 (SA-Cy5) conjugate dissolved in a saline buffer solution was spotted on the PNA, and the fluorescence signals of the SA-Cy5 were measured and compared with those on a bare glass substrate. The enhancement factor was affected by the gap between the nanolenses, and the maximum enhancement factor of ~128 was obtained from the PNA with a SiO(2) layer thickness of 150 nm and an Ag layer thickness of 100 nm. Finally, an electromagnetic field analysis was used to examine the fluorescence signal enhancement, and was conducted using rigorous coupled wave analysis.