Synthesis and characterization of single-phase epitaxial Cr(2)N thin films by reactive magnetron sputtering

Cr(2)N is commonly found as a minority phase or inclusion in stainless steel, CrN-based hard coatings, etc. However, studies on phase-pure material for characterization of fundamental properties are limited. Here, Cr(2)N thin films were deposited by reactive magnetron sputtering onto (0001) sapphire...

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Detalles Bibliográficos
Autores principales: Gharavi, M. A., Greczynski, G., Eriksson, F., Lu, J., Balke, B., Fournier, D., le Febvrier, A., Pallier, C., Eklund, P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2018
Materias:
Electronic Materials
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6411273/
https://www.ncbi.nlm.nih.gov/pubmed/30930478
http://dx.doi.org/10.1007/s10853-018-2914-z

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