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Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam

Fabrication of single crystal diamond capacitive pressure sensor is presented. Firstly, the single crystal diamond cantilever beam was formed on HPHT diamond substrate by using selective high-energy ion implantation, metal patterning, ICP etching and electrochemical etching techniques. Secondly, on...

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Detalles Bibliográficos
Autores principales:	Fu, Jiao, Zhu, Tianfei, Liang, Yan, Liu, Zhangcheng, Wang, Ruozheng, Zhang, Xiaofan, Wang, Hong-Xing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6423233/ https://www.ncbi.nlm.nih.gov/pubmed/30886167 http://dx.doi.org/10.1038/s41598-019-40582-x

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