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Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption

One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thorou...

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Detalles Bibliográficos
Autores principales: Waller, Erik Hagen, von Freymann, Georg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6432245/
https://www.ncbi.nlm.nih.gov/pubmed/30974572
http://dx.doi.org/10.3390/polym8080297
Descripción
Sumario:One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.