Cargando…

Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption

One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thorou...

Descripción completa

Detalles Bibliográficos
Autores principales: Waller, Erik Hagen, von Freymann, Georg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6432245/
https://www.ncbi.nlm.nih.gov/pubmed/30974572
http://dx.doi.org/10.3390/polym8080297
_version_ 1783406090489167872
author Waller, Erik Hagen
von Freymann, Georg
author_facet Waller, Erik Hagen
von Freymann, Georg
author_sort Waller, Erik Hagen
collection PubMed
description One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect.
format Online
Article
Text
id pubmed-6432245
institution National Center for Biotechnology Information
language English
publishDate 2016
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-64322452019-04-02 Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption Waller, Erik Hagen von Freymann, Georg Polymers (Basel) Article One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect. MDPI 2016-08-10 /pmc/articles/PMC6432245/ /pubmed/30974572 http://dx.doi.org/10.3390/polym8080297 Text en © 2016 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Waller, Erik Hagen
von Freymann, Georg
Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title_full Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title_fullStr Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title_full_unstemmed Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title_short Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption
title_sort spatio-temporal proximity characteristics in 3d μ-printing via multi-photon absorption
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6432245/
https://www.ncbi.nlm.nih.gov/pubmed/30974572
http://dx.doi.org/10.3390/polym8080297
work_keys_str_mv AT wallererikhagen spatiotemporalproximitycharacteristicsin3dmprintingviamultiphotonabsorption
AT vonfreymanngeorg spatiotemporalproximitycharacteristicsin3dmprintingviamultiphotonabsorption