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On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

The synthesis of nanoporous ZnO thin films is achieved through annealing of zinc-alkoxide (“zincone”-like) layers obtained by plasma-enhanced atomic layer deposition (PE-ALD). The zincone-like layers are deposited through sub-saturated PE-ALD adopting diethylzinc and O(2) plasma with doses below sel...

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Detalles Bibliográficos
Autores principales:	Perrotta, Alberto, Pilz, Julian, Pachmajer, Stefan, Milella, Antonella, Coclite, Anna Maria
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2019
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444448/ https://www.ncbi.nlm.nih.gov/pubmed/30993055 http://dx.doi.org/10.3762/bjnano.10.74

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