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Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices

This paper reports on a new type of high-frequency mode-matched gyroscope with significantly reduced dependencies on environmental stimuli such as temperature, vibration, and shock. A novel stress-isolation system is used to effectively decouple an axis-symmetric bulk-acoustic wave (BAW) vibratory g...

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Detalles Bibliográficos
Autores principales:	Serrano, Diego E., Zaman, Mohammad F., Rahafrooz, Amir, Hrudey, Peter, Lipka, Ron, Younkin, Duane, Nagpal, Shin, Jafri, Ijaz, Ayazi, Farrokh
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group 2016
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444736/ https://www.ncbi.nlm.nih.gov/pubmed/31057820 http://dx.doi.org/10.1038/micronano.2016.15

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