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Electron-beam lithography for polymer bioMEMS with submicron features
We present a method for submicron fabrication of flexible, thin-film structures fully encapsulated in biocompatible polymer poly(chloro-p-xylylene) (Parylene C) that improves feature size and resolution by an order of magnitude compared with prior work. We achieved critical dimensions as small as 25...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group
2016
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444738/ https://www.ncbi.nlm.nih.gov/pubmed/31057839 http://dx.doi.org/10.1038/micronano.2016.53 |