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Precision in harsh environments

Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnet...

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Detalles Bibliográficos
Autores principales: French, Paddy, Krijnen, Gijs, Roozeboom, Fred
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444743/
https://www.ncbi.nlm.nih.gov/pubmed/31057836
http://dx.doi.org/10.1038/micronano.2016.48
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author French, Paddy
Krijnen, Gijs
Roozeboom, Fred
author_facet French, Paddy
Krijnen, Gijs
Roozeboom, Fred
author_sort French, Paddy
collection PubMed
description Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnetic noise, radiation, or high vacuum. In the field of actuators, the devices must maintain stringent accuracy specifications for displacement, force, and response times, among others. These new requirements present additional challenges in the compensation for or elimination of cross-sensitivities. Many state-of-the-art precision devices lose their precision and reliability when exposed to harsh environments. It is also important that advanced sensor and actuator systems maintain maximum autonomy such that the devices can operate independently with low maintenance. The next-generation microsystems will be deployed in remote and/or inaccessible and harsh environments that present many challenges to sensor design, materials, device functionality, and packaging. All of these aspects of integrated sensors and actuator microsystems require a multidisciplinary approach to overcome these challenges. The main areas of importance are in the fields of materials science, micro/nano-fabrication technology, device design, circuitry and systems, (first-level) packaging, and measurement strategy. This study examines the challenges presented by harsh environments and investigates the required approaches. Examples of successful devices are also given.
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spelling pubmed-64447432019-05-03 Precision in harsh environments French, Paddy Krijnen, Gijs Roozeboom, Fred Microsyst Nanoeng Review Article Microsystems are increasingly being applied in harsh and/or inaccessible environments, but many markets expect the same level of functionality for long periods of time. Harsh environments cover areas that can be subjected to high temperature, (bio)-chemical and mechanical disturbances, electromagnetic noise, radiation, or high vacuum. In the field of actuators, the devices must maintain stringent accuracy specifications for displacement, force, and response times, among others. These new requirements present additional challenges in the compensation for or elimination of cross-sensitivities. Many state-of-the-art precision devices lose their precision and reliability when exposed to harsh environments. It is also important that advanced sensor and actuator systems maintain maximum autonomy such that the devices can operate independently with low maintenance. The next-generation microsystems will be deployed in remote and/or inaccessible and harsh environments that present many challenges to sensor design, materials, device functionality, and packaging. All of these aspects of integrated sensors and actuator microsystems require a multidisciplinary approach to overcome these challenges. The main areas of importance are in the fields of materials science, micro/nano-fabrication technology, device design, circuitry and systems, (first-level) packaging, and measurement strategy. This study examines the challenges presented by harsh environments and investigates the required approaches. Examples of successful devices are also given. Nature Publishing Group 2016-10-10 /pmc/articles/PMC6444743/ /pubmed/31057836 http://dx.doi.org/10.1038/micronano.2016.48 Text en Copyright © 2016 The Author(s) http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
spellingShingle Review Article
French, Paddy
Krijnen, Gijs
Roozeboom, Fred
Precision in harsh environments
title Precision in harsh environments
title_full Precision in harsh environments
title_fullStr Precision in harsh environments
title_full_unstemmed Precision in harsh environments
title_short Precision in harsh environments
title_sort precision in harsh environments
topic Review Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6444743/
https://www.ncbi.nlm.nih.gov/pubmed/31057836
http://dx.doi.org/10.1038/micronano.2016.48
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