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Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography
In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to ‘scratch’ nanoscale channels on polymethylmethacrylate (PMMA) substrates with suffi...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445022/ https://www.ncbi.nlm.nih.gov/pubmed/31057852 http://dx.doi.org/10.1038/micronano.2016.84 |