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Inkjet printing technology for increasing the I/O density of 3D TSV interposers
Interposers with through-silicon vias (TSVs) play a key role in the three-dimensional integration and packaging of integrated circuits and microelectromechanical systems. In the current practice of fabricating interposers, solder balls are placed next to the vias; however, this approach requires a l...
Autores principales: | Khorramdel, Behnam, Liljeholm, Jessica, Laurila, Mika-Matti, Lammi, Toni, Mårtensson, Gustaf, Ebefors, Thorbjörn, Niklaus, Frank, Mäntysalo, Matti |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445024/ https://www.ncbi.nlm.nih.gov/pubmed/31057857 http://dx.doi.org/10.1038/micronano.2017.2 |
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