Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays

Vertically aligned carbon nanotube arrays (VACNTs) show a great potential for various applications, such as thermal interface materials (TIMs). Besides the thermally oxidized SiO(2), atomic layer deposition (ALD) was also used to synthesize oxide buffer layers before the deposition of the catalyst,...

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Detalles Bibliográficos
Autores principales: Li, Hao-Hao, Yuan, Guang-Jie, Shan, Bo, Zhang, Xiao-Xin, Ma, Hong-Ping, Tian, Ying-Zhong, Lu, Hong-Liang, Liu, Johan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2019
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445904/
https://www.ncbi.nlm.nih.gov/pubmed/30941586
http://dx.doi.org/10.1186/s11671-019-2947-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445904/
https://www.ncbi.nlm.nih.gov/pubmed/30941586
http://dx.doi.org/10.1186/s11671-019-2947-5

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