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Atomic Layer Deposition of Buffer Layers for the Growth of Vertically Aligned Carbon Nanotube Arrays
Vertically aligned carbon nanotube arrays (VACNTs) show a great potential for various applications, such as thermal interface materials (TIMs). Besides the thermally oxidized SiO(2), atomic layer deposition (ALD) was also used to synthesize oxide buffer layers before the deposition of the catalyst,...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6445904/ https://www.ncbi.nlm.nih.gov/pubmed/30941586 http://dx.doi.org/10.1186/s11671-019-2947-5 |