The Transition to Paschen’s Law for Microscale Gas Breakdown at Subatmospheric Pressure

The decrease in electronic device size necessitates greater understanding of gas breakdown and electron emission at microscale to optimize performance. While traditional breakdown theory using Paschen’s law (PL), driven by Townsend avalanche, fails for gap distance d [Formula: see text]  15 μm, rece...

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Detalles Bibliográficos
Autores principales: Loveless, Amanda M., Meng, Guodong, Ying, Qi, Wu, Feihong, Wang, Kejing, Cheng, Yonghong, Garner, Allen L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450947/
https://www.ncbi.nlm.nih.gov/pubmed/30952912
http://dx.doi.org/10.1038/s41598-019-42111-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450947/
https://www.ncbi.nlm.nih.gov/pubmed/30952912
http://dx.doi.org/10.1038/s41598-019-42111-2

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