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The Transition to Paschen’s Law for Microscale Gas Breakdown at Subatmospheric Pressure
The decrease in electronic device size necessitates greater understanding of gas breakdown and electron emission at microscale to optimize performance. While traditional breakdown theory using Paschen’s law (PL), driven by Townsend avalanche, fails for gap distance d [Formula: see text] 15 μm, rece...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6450947/ https://www.ncbi.nlm.nih.gov/pubmed/30952912 http://dx.doi.org/10.1038/s41598-019-42111-2 |