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Optimal principal component analysis of STEM XEDS spectrum images
STEM XEDS spectrum images can be drastically denoised by application of the principal component analysis (PCA). This paper looks inside the PCA workflow step by step on an example of a complex semiconductor structure consisting of a number of different phases. Typical problems distorting the princip...
Autores principales: | Potapov, Pavel, Lubk, Axel |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer International Publishing
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6456488/ https://www.ncbi.nlm.nih.gov/pubmed/31032174 http://dx.doi.org/10.1186/s40679-019-0066-0 |
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