Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (with controllable sizes) on PDMS chips, and nanochannel size was controlled by the driving voltage and frequency inputted to the piezoelectric actuator. Moreover, microchannel and nanochannel molds were respectively fabricated by UV lithography and AFM tip-based nanomilling, and finally, PDMS slabs with micro/nanochannels were obtained by transfer process. The influences of PDMS weight ratio on nanochannel size were also investigated. The bonding process of microchannel and nanochannel slabs was conducted on a homemade alignment system consisted of an optical monocular microscope and precision stages. Furthermore, the effects of nanochannel size on electrical characteristics of KCl solution (concentration of 1 mM) were analyzed. Therefore, it can be concluded that PDMS nanofluidic devices with multiple nanochannels of sub-100-nm depth can be efficiently and economically fabricated by the proposed method. ELECTRONIC SUPPLEMENTARY MATERIAL: The online version of this article (10.1186/s11671-019-2962-6) contains supplementary material, which is available to authorized users.