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Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process
In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (w...
Autores principales: | Wang, Jiqiang, Yan, Yongda, Geng, Yanquan, Gan, Yang, Fang, Zhuo |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6470239/ https://www.ncbi.nlm.nih.gov/pubmed/30997583 http://dx.doi.org/10.1186/s11671-019-2962-6 |
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