A Piezoelectric Resonance Pump Based on a Flexible Support

Small volume changes are important factors that restrict the improvement of the performance of a piezoelectric diaphragm pump. In order to increase the volume change of the pump chamber, a square piezoelectric vibrator with a flexible support is proposed in this paper and used as the driving unit of the pump. The pump chamber diaphragm was separated from the driving unit, and the resonance principle was used to amplify the amplitude of the pump diaphragm. After analyzing the working principle of the piezoelectric resonance pump and establishing the motion differential equation of the vibration system, prototypes with different structural parameters were made and tested. The results show that the piezoelectric resonance pump resonated at 236 Hz when pumping air. When the peak-to-peak voltage of the driving power was 220 V, the amplitude of the diaphragm reached a maximum value of 0.43933 mm, and the volume change of the pump was correspondingly improved. When the pump chamber height was 0.25 mm, the output flow rate of pumping water reached a maximum value of 213.5 mL/min. When the chamber height was 0.15 mm, the output pressure reached a maximum value of 85.2 kPa.