Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative hu...

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Autores principales: Rydosz, Artur, Brudnik, Andrzej, Staszek, Kamil
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471264/
https://www.ncbi.nlm.nih.gov/pubmed/30875985
http://dx.doi.org/10.3390/ma12060877
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author Rydosz, Artur
Brudnik, Andrzej
Staszek, Kamil
author_facet Rydosz, Artur
Brudnik, Andrzej
Staszek, Kamil
author_sort Rydosz, Artur
collection PubMed
description Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0–200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO(2)-based gas sensors, while for methanol detection both dioxides, SnO(2) and TiO(2), exhibited good sensitivity.
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spelling pubmed-64712642019-04-27 Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range Rydosz, Artur Brudnik, Andrzej Staszek, Kamil Materials (Basel) Article Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0–200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO(2)-based gas sensors, while for methanol detection both dioxides, SnO(2) and TiO(2), exhibited good sensitivity. MDPI 2019-03-15 /pmc/articles/PMC6471264/ /pubmed/30875985 http://dx.doi.org/10.3390/ma12060877 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Rydosz, Artur
Brudnik, Andrzej
Staszek, Kamil
Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title_full Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title_fullStr Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title_full_unstemmed Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title_short Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range
title_sort metal oxide thin films prepared by magnetron sputtering technology for volatile organic compound detection in the microwave frequency range
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471264/
https://www.ncbi.nlm.nih.gov/pubmed/30875985
http://dx.doi.org/10.3390/ma12060877
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AT staszekkamil metaloxidethinfilmspreparedbymagnetronsputteringtechnologyforvolatileorganiccompounddetectioninthemicrowavefrequencyrange

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