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Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications
In this study, vanadium oxide (V(x)O(y)) semiconducting resistive thermometer thin films were developed, and their temperature-dependent resistive behavior was examined. Multilayers of 5-nm-thick vanadium pentoxide (V(2)O(5)) and 5-nm-thick vanadium (V) films were alternately sputter-deposited, at r...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471619/ https://www.ncbi.nlm.nih.gov/pubmed/30884794 http://dx.doi.org/10.3390/s19061320 |
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author | Abdel-Rahman, Mohamed Zia, Muhammad Alduraibi, Mohammad |
author_facet | Abdel-Rahman, Mohamed Zia, Muhammad Alduraibi, Mohammad |
author_sort | Abdel-Rahman, Mohamed |
collection | PubMed |
description | In this study, vanadium oxide (V(x)O(y)) semiconducting resistive thermometer thin films were developed, and their temperature-dependent resistive behavior was examined. Multilayers of 5-nm-thick vanadium pentoxide (V(2)O(5)) and 5-nm-thick vanadium (V) films were alternately sputter-deposited, at room temperature, to form 105-nm-thick V(x)O(y) films, which were post-deposition annealed at 300 °C in O(2) and N(2) atmospheres for 30 and 40 min. The synthesized V(x)O(y) thin films were then patterned into resistive thermometer structures, and their resistance versus temperature (R-T) characteristics were measured. Samples annealed in O(2) achieved temperature coefficients of resistance (TCRs) of −3.0036 and −2.4964%/K at resistivity values of 0.01477 and 0.00819 Ω·cm, respectively. Samples annealed in N(2) achieved TCRs of −3.18 and −1.1181%/K at resistivity values of 0.04718 and 0.002527 Ω·cm, respectively. The developed thermometer thin films had TCR/resistivity properties suitable for microbolometer and antenna-coupled microbolometer applications. The employed multilayer synthesis technique was shown to be effective in tuning the TCR/resistivity properties of the thin films by varying the annealing conditions. |
format | Online Article Text |
id | pubmed-6471619 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2019 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-64716192019-04-26 Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications Abdel-Rahman, Mohamed Zia, Muhammad Alduraibi, Mohammad Sensors (Basel) Article In this study, vanadium oxide (V(x)O(y)) semiconducting resistive thermometer thin films were developed, and their temperature-dependent resistive behavior was examined. Multilayers of 5-nm-thick vanadium pentoxide (V(2)O(5)) and 5-nm-thick vanadium (V) films were alternately sputter-deposited, at room temperature, to form 105-nm-thick V(x)O(y) films, which were post-deposition annealed at 300 °C in O(2) and N(2) atmospheres for 30 and 40 min. The synthesized V(x)O(y) thin films were then patterned into resistive thermometer structures, and their resistance versus temperature (R-T) characteristics were measured. Samples annealed in O(2) achieved temperature coefficients of resistance (TCRs) of −3.0036 and −2.4964%/K at resistivity values of 0.01477 and 0.00819 Ω·cm, respectively. Samples annealed in N(2) achieved TCRs of −3.18 and −1.1181%/K at resistivity values of 0.04718 and 0.002527 Ω·cm, respectively. The developed thermometer thin films had TCR/resistivity properties suitable for microbolometer and antenna-coupled microbolometer applications. The employed multilayer synthesis technique was shown to be effective in tuning the TCR/resistivity properties of the thin films by varying the annealing conditions. MDPI 2019-03-16 /pmc/articles/PMC6471619/ /pubmed/30884794 http://dx.doi.org/10.3390/s19061320 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Abdel-Rahman, Mohamed Zia, Muhammad Alduraibi, Mohammad Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title | Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title_full | Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title_fullStr | Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title_full_unstemmed | Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title_short | Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications |
title_sort | temperature-dependent resistive properties of vanadium pentoxide/vanadium multi-layer thin films for microbolometer & antenna-coupled microbolometer applications |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471619/ https://www.ncbi.nlm.nih.gov/pubmed/30884794 http://dx.doi.org/10.3390/s19061320 |
work_keys_str_mv | AT abdelrahmanmohamed temperaturedependentresistivepropertiesofvanadiumpentoxidevanadiummultilayerthinfilmsformicrobolometerantennacoupledmicrobolometerapplications AT ziamuhammad temperaturedependentresistivepropertiesofvanadiumpentoxidevanadiummultilayerthinfilmsformicrobolometerantennacoupledmicrobolometerapplications AT alduraibimohammad temperaturedependentresistivepropertiesofvanadiumpentoxidevanadiummultilayerthinfilmsformicrobolometerantennacoupledmicrobolometerapplications |