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Temperature-Dependent Resistive Properties of Vanadium Pentoxide/Vanadium Multi-Layer Thin Films for Microbolometer & Antenna-Coupled Microbolometer Applications
In this study, vanadium oxide (V(x)O(y)) semiconducting resistive thermometer thin films were developed, and their temperature-dependent resistive behavior was examined. Multilayers of 5-nm-thick vanadium pentoxide (V(2)O(5)) and 5-nm-thick vanadium (V) films were alternately sputter-deposited, at r...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6471619/ https://www.ncbi.nlm.nih.gov/pubmed/30884794 http://dx.doi.org/10.3390/s19061320 |