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Maskless Spatioselective Functionalization of Silicon Nanowires
Spatioselective functionalization of silicon nanowires was achieved without using a masking material. The designed process combines metal‐assisted chemical etching (MACE) to fabricate silicon nanowires and hydrosilylation to form molecular monolayers. After MACE, a monolayer was formed on the expose...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
John Wiley and Sons Inc.
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6473541/ https://www.ncbi.nlm.nih.gov/pubmed/31032177 http://dx.doi.org/10.1002/cnma.201800072 |